Nanocrystalline DIAMOND. story 2

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Karla Vítková
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1 Nanocrystalline DIAMOND story 2 Alexander KROMKA Milan VANĚČEK

2 Thanks... Milan VANĚČEK former head of depart. Alexander KROMKA (diamond group leader) Jirka POTMĚŠIL (technology) Zdenek REMEŠ (optic. measur.) Bohuš Rezek (AFM & I-V measurem.) Halyna KOZÁK (surface conductivity) Josef Zemek (XPS measur.) Zdenka Poláčková (chemical cleaning) external partners: L. Bačáková, Ľ. Grausová M. Kalbáčová, O. Broš IMO Hasselt (Ken Haenen) PhD students: Oleg BABCHENKO Lenka MICHALIKOVÁ Marina DAVYDOVA? others researchers: lithography, XPS SEM, chemistry electrical measurements etc....

Deposition facilities Story 1 Microwave Plasma CVD Process AIXTRON - P6 - ellipsoidal reactor - microwave frq. 2.

3 Deposition facilities Story 1 Microwave Plasma CVD Process AIXTRON - P6 - ellipsoidal reactor - microwave frq GHz - maximum power 6 kw - substrate size 2 or 3 - rotating substrate stage - stable plasma at high pressure - fully PC controlled Substrates: Si, Mo, W, Ti, Pt, Al, TiAlV, Au sapphire, glass, ceramics

4 (nanocrystalline) Diamond NANO on MICRO growth on FLAT or ROUGH surface (defined NANO-topography over MICRO-flatness) A) Si: RMS=<1 nm NANO on NANO Diamond layer always constant! Scan: 50 x 50 µm 2 rms = 500 nm B) Si: RMS=500 nm NANO on MICRO Detailed scan: 1 x 1 µm 2 rms = 7.6 nm

5 Nanocrystalline diamond as bio-substrate biocompatible substrate (for electronic?) hydrophobic α 100 el. conductive SAOS 2 osteobl. cells 2 days cultivation Defined contact angle : hydrophilic α 15 el. isolating a 90 a 60 a 30 YES for bio-technology

Bacakova) stainin g of talin - patent pending on selective growth of living cells

6 Realized work related to Story 1 - NCD samples for bio experiments - deposition for ELISA (4 cm in diameter) - papers on NCD and Bio (group Dr. Bacakova) stainin g of talin - patent pending on selective growth of living cells PV# ( ): Způsob přípravy uspořádaných buněčných struktur Rezek et al. Kalbacova/Kmoch Bacakova/Grausova

7 Realized work Story 2 - boron doped NCD samples for bio experiments A) set of 36 samples (both-side depos. on 10x10 mm 2 ) -intrinsic NCD -low/medium/high boron doping (Prof. K. Haenen) (XPS, Raman, SEM, biocompatibility) B) set of 4 samples (both-side depos. on φ~5 cm) -ELISA experiments Samples pre-cleaned, oxygen terminated and characterized, bio-tested, output in year 2009 and

8 Realized work Story 2 -nanostructured diamond films A) reactive ion plasma etching -intrinsic NCD & self assembled mask (paper submitted) -presented by O. Babchenko at SSSI conference (11/2008, Slovakia) B) preliminary work on cell growth -SAOS-2 cells (group Dr. Kalbacova) 2009) -Fluorescent staining of vinculin (confer. Hasselt 2009, Kirchberg C) geometrically defined surface morphology 2009) -size of the structures (micro-dimensions, nano?) (summer

Nanostructured diamond films (history) ICP

) Etching: -silicon -silicon oxide -diamond

9 Nanostructured diamond films (history) ICP Upgrade deep etching Reactive Ion Etching (Phantom LT) Gases: - argon, oxygen, CF4 -other gases (2009?) Etching: -silicon -silicon oxide -diamond December 2007 Clean room conditions Wafers up to 20 cm in diam. Vacuum system?! Dr. Fendrych

10 Nanostructured diamond films - year 2008 Metal Mask preparation Nanodiamond Thermal vapor deposition of metal (Au, Ni) metal layer Ultrasonic seeding of nanodiamond grains nanodiamond grains diamond plasma treatment diamond Ready mask: no further steps necessity metal nanoislands diamond Resistance to reactive ion etching (?) NO lithography, only self-assembling (!)

11 Mask preparation Observation of SEM measurements: Diamond powder grains size of grains 5 40 nm Gold size of particles 5 10 nm Nickel size of particles nm

12 Reactive ion plasma etching After etching images: Diamond powder as mask Gold as mask Nickel as mask

Reactive ion plasma etching Angle SEM image and EDX data from etched sample where as mask have been used Ni nanoparticles SiKα 200

13 Reactive ion plasma etching Angle SEM image and EDX data from etched sample where as mask have been used Ni nanoparticles SiKα C Kα 50 NiKα NiLα NiKβ kev nanorods 400 nm substrate Trees of diamond nanorods meas. angle 30 Cross section view

14 Closing remarks: A) Diamond technology (Dr. Kromka/Dr. Vanecek) new GAAV NCD growth -> intrinsic & boron doped layers (soon at FZU) (nano) Structuring of NCD films -> RIE (1 conf. + 1x submit. paper) established STRONG potential in the field of NCD technology B) Bio activities Dr. Bacakova (publications, conferences, coming events) Dr. Kalbacova (indirect co-operation, new events on structured samples) C) FZU infrastructure Purkyne Fellowship ( ) Dr. Rezek (KAN project, 1x patent pending) Dr. Smrcka (KAN project) & Institutional Research Plan

15 Closing remarks: A) Coming activities defined experiments with Dr. Bacakova material, personnel (student), conferences new projects (GACR, GAAV, EU) B) requirements of other groups opened discussion... Thank for your attention and patience!...

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